Focus on China's major breakthroughs in lithography technology
Recently, the Ministry of Industry and Information Technology of China officially issued the "Guidelines for the Promotion and Application of the First Major Technical Equipment (2024 Edition)" (hereinafter referred to as the "Guidelines"), which aims to promote the innovative development and widespread application of the first major technical equipment in China, and at the same time strengthen the synergy of national support policies such as industry, finance, finance, and science and technology. In the "Guidelines", a variety of integrated circuit production equipment such as krypton fluoride lithography machines and argon fluoride lithography machines are clearly listed, marking that China has made significant technological breakthroughs in the field of high-end lithography machines.
The milestone significance of lithography technology breakthroughs
The successful selection of krypton fluoride lithography machines and argon fluoride lithography machines is not only an important manifestation of China's independent innovation capabilities in the semiconductor industry chain, but also a solid step taken by China in the global scientific and technological competition. As key equipment for integrated circuit production, the improvement of the technical parameters of these two lithography machines directly reflects China's profound accumulation in the fields of precision manufacturing and optical engineering.
Technical parameters and international benchmarks
· Krypton fluoride lithography machine: Its light source wavelength reaches 248 nanometers, the resolution is less than or equal to 110nm, and the overlay accuracy is accurate to within 25nm. This indicator is close to the performance level of the international mainstream mid-range lithography machine, showing China's competitiveness in the mid-range lithography machine market.
· Argon fluoride lithography machine: It is more advanced, with a light source wavelength of 193 nanometers, a resolution of less than or equal to 65nm, and an overlay accuracy of less than 8nm. This technical parameter not only surpasses the previous level of domestic lithography machines, but also is comparable to the products of the world's top lithography machine manufacturers, showing China's strong potential for advanced processes.
Promote industrial application and market expansion
The release of the "Guide Catalog" will further promote the promotion and application of domestic high-end lithography machines such as krypton fluoride lithography machines and argon fluoride lithography machines in the market. By strengthening the synergy of national support policies, China will be expected to break the monopoly of foreign technology and increase the share of domestic lithography machines in the global market. At the same time, this will also stimulate the innovation vitality of upstream and downstream enterprises in the domestic semiconductor industry chain and form a more complete industrial ecological system.
Outlook for future development
With the continuous maturity and application expansion of domestic lithography technology, China's semiconductor industry is expected to achieve a transformation from "following" to "running side by side" and even "leading". This will not only greatly enhance China's voice in the global semiconductor industry chain, but also provide more diversified and cost-effective semiconductor solutions for domestic and foreign customers. Looking to the future, we have reason to believe that China's semiconductor industry will shine more brightly on the global science and technology stage.
In short, the issuance of the "Guidelines for the Promotion and Application of the First Major Technical Equipment (2024 Edition)" by the Ministry of Industry and Information Technology is an important milestone in the development of China's semiconductor industry. It not only demonstrates China's remarkable achievements in the field of lithography technology, but also points out the direction for the future development of China's semiconductor industry.
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